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In Addition To Photolithography, Domestic Chip Equipment Basically Reached 28nm, A Few Reached 3nm

Click:129TimesEditor: DingJiaNuoDa Time:2022-12-05
To be honest, I guess there is no country in the world like China, which needs to be in the whole chip industry chain, to achieve full autonomy. Other countries are integrated with the global supply chain, manufacturing their own chips on the line.
China is suppressed by the United States, had to develop a full industrial chain of chips to avoid being stuck, the world is estimated that only this one.
But we also know that the development of the whole industry chain, indeed difficult, after all, from the sand into the chip process, requiring dozens of hundreds of materials, hundreds of equipment, thousands of processes, all to master, it is really too difficult.
But the good news is that, after so many years of development, in addition to photolithography, other semiconductor equipment, we have basically reached 28nm process, some even reached 3nm.
This means that, in addition to photolithography, mainland China has initially established self-sufficiency in 28nm chip equipment, and basically can achieve localization.
As we know, from sand into chips, very complex, where the front process is the focus, here the link is mainly completed by the chip foundry, mainland China's leading chip foundry is SMIC.
In the foundry, the process is generally divided into eight small processes, respectively, diffusion, thin film deposition, lithography, etching, ion implantation, CMP polishing, metallization, testing, where the equipment is very critical, and the United States is also mainly in these links stuck us.
But as shown above, at present, these key equipment, in addition to photolithography, basically achieved 28nm mass production, and some of the equipment reached 3nm, for example, the etching machine of SMIC, Eitang Semiconductor's debonding machine, it reached 5nm, in the verification of 3nm; Eitang Semiconductor's etching equipment reached 10nm, in the verification of 7nm, Shengmei Semiconductor's cleaning machine in the verification of 7nm.
However, some users said that if the lithography machine does not break through, other equipment breakthroughs are in the air, because the lithography machine is still in the 90nm, as long as a card lithography machine, the other is all stuck.
So the domestic lithography really have to work hard, has been the shortest piece of the short board in the whole industry chain, seriously dragging the leg.
However, we should also note that here is only the semiconductor equipment part. Chip manufacturing is also inseparable from the EDA, inseparable from a variety of IP, a variety of materials, these places we still have a lot of lessons to make up.
For example, IP, foreign brands account for at least 95% of the share, the share of domestic chip IP less than 5%; EDA, foreign brands accounted for 95% of the share, less than 5% of domestic brands. There are materials, we also rely heavily on imports, such as photoresist domestic share of less than 10%, 90% by imports, while the highest domestic photoresist can only reach about 40nm.
It can be seen that it is not easy to get the chip industry chain, the need for domestic manufacturers to persist for decades, but also the need for domestic manufacturers to support the efforts, although the current progress is obvious, but the road is still very long.

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